Electron Optic Services, Inc.
70 Bentley Ave; Suite 205.
Ottawa, Ontario
K2E 6T8 CANADA
Phone (613) 723-7773
Fax (819) 684-2308
http://www.eos.ca
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Tescan VEGA TS5130 Specifications
Electron Optics
| Electron Optical Column | 4 Electromagnetic lenses |
| Electron Optical working modes | Resolution, Depth, Field, Fish-Eye |
| Electron Gun | Tungsten hairpin, thermionic cathode |
| Accelerating Voltage | 500V to 30kV, variable in 100V steps |
| Resolution | 3.5nm, 30kV, 4mm WD |
| Magnification | 5x to 500,000x |
| Probe Current | 1pA to 2ľA |
Specimen Chamber/Eucentric Stage (Model 5130XM)
| Internal Diameter | 300mm width x 330mm max. depth |
| Number of Ports | 12: SE, BSE, EDX(2 Ports), WDX, EBSD,
Pump and 5 available ports |
| Door Opening | 280mm width x 310mm height |
| Stage X movement | 130mm - motorized, software-controlled |
| Stage Y movement | 130mm - motorized, software-controlled |
| Stage Z movement | 100mm - motorized, software-controlled |
| Rotation | 360° continuous - motorized, software-controlled |
| Eucentric Tilt | -70° to +70° motorized, compucentric |
Vacuum System
| Control | Fully automatic, software controlled |
| Pumping | Turbomolecular pump + Rotary vane pump
Backing valve isolates foreline and rotary pump during venting |
| Vacuum gauges |
Two extended-range Pirani gauges, digital GUI display of
chamber and column pressure in user-selectable units
(e.g. Pa, Torr, mbar, etc.) |
| Working Vacuum | 5 x 10-3 Pa |
| Pumping time after specimen exchange | 3 minutes |
TS5130 Columns
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