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Electron Optic Services, Inc.
70 Bentley Ave; Suite 205.
Ottawa, Ontario
K2E 6T8 CANADA
Phone (613) 723-7773
Fax (819) 684-2308
http://www.eos.ca
Tescan VEGA TS5136 Specifications


Electron Optics

Electron Optical Column4 Electromagnetic lenses
Electron Optical working modesResolution, Depth, Field, Fish-Eye
Electron GunTungsten hairpin, thermionic cathode
Accelerating Voltage500V to 30kV, variable in 100V steps
Resolution3.5nm, 30kV, 4mm WD
Magnification5x to 500,000x
Probe Current1pA to 2ľA


'XM' Specimen Chamber/Eucentric Stage (Model 5136XM)

Internal Diameter300mm width x 330mm max. depth
Number of Ports12: SE, BSE, EDX(2 Ports), WDX, EBSD,
Pump and 5 available ports
Door Width280mm width x 310mm height
Stage X movement130mm - motorized, software-controlled
Stage Y movement130mm - motorized, software-controlled
Stage Z movement100mm - motorized, software-controlled
Rotation360° continuous - motorized, software-controlled
Eucentric Tilt-70° to +70° motorized, compucentric


Vacuum System

ControlFully automatic, software controlled
PumpingTurbomolecular pump + Rotary vane pump
Backing valve isolates foreline and rotary pump during venting
Vacuum gauges Two extended-range Pirani gauges, digital GUI display of
chamber and column pressure in user-selectable units
(e.g. Pa, Torr, mbar, etc.)
Working VacuumHi Vacuum Mode: 5 x 10-3 Pa
Medium Vacuum Mode: 5-200 Pa
Low Vacuum Mode: 5-500 Pa
Pumping time after specimen exchange3 minutes

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